■ Product Overview
Precision stage is a high-performance motion platform developed for ultra-precision machining and advanced manufacturing applications. It uses natural granite as the primary structural material for the base and gantry beam, combined with direct-drive linear motor technology and a gantry-type architecture to provide high-precision linear motion.
The platform typically consists of several key components: a precision granite base serving as the primary reference structure; vertical columns mounted on both sides of the base and a crossbeam supported by the columns to form the gantry frame; upper and lower axes installed on the crossbeam and base respectively and driven directly by linear motors; and high-precision linear scales for position feedback and closed-loop control. Selected high-end configurations also feature dual-drive architecture, with linear motors symmetrically arranged on both sides of the lower axis to provide increased thrust and support positioning error compensation.
The platform's performance is derived from the combination of a granite structure and linear motor direct drive. Granite has low internal stress and a coefficient of thermal expansion approximately one-third that of steel, making the structure less sensitive to temperature fluctuations. Meanwhile, direct linear motor drive eliminates mechanical transmission components such as screws and gears, avoiding backlash, elastic deformation, friction, and mechanical wear associated with conventional transmission systems. The platform also provides smooth low-speed motion with minimal velocity fluctuation, without the stick-slip behavior commonly associated with screw-driven systems. The high rigidity and excellent vibration damping characteristics of the granite structure effectively absorb and dissipate vibration energy generated during motion, helping maintain end-of-axis positioning accuracy during high-speed and high-acceleration operation. The non-contact drive principle further reduces mechanical wear, extending service life and lowering maintenance requirements.
With its combination of high precision, fast dynamic response, and long-term stability, the precision stage is widely used in semiconductor manufacturing equipment, ultra-precision CNC machining, precision metrology, flat panel display manufacturing, laser precision processing, and other demanding motion applications.

